Document imaging is an information technology category for systems capable of replicating documents commonly used in business. Document imaging systems can take many forms including microfilm, on demand printers, facsimile machines, copiers, multifunction printers, document scanners, computer output microfilm (COM) and archive writers. Document Imaging means the conversion of paper files (of any size or description) or microfilm / fiche to digital images. The image can be form in TEM (transmission electron microscope), here the image is form by scattering of electron beam. In TLM (transmission light microscope), the image is formed by the consequence observation of light. By the increasing thickness or density the image can be contrasted with acceleration voltage.